DIN 50450-3 Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of methane impurity in H<(Index)2>, O<(Index)2>, N<(Index)2>, Ar and He by using a flame ionization detector (FID)

standard by Deutsches Institut Fur Normung E.V. (German National Standard), 03/01/1991