JIS C 5630-2:2009
JIS C 5630-2:2009
Semiconductor Devices - Micro-electromechanical Devices - Part 2: Tensile Testing Method Of Thin Film Materials
Japanese Standards Association
Semiconductor Devices - Micro-electromechanical Devices - Part 2: Tensile Testing Method Of Thin Film Materials
Japanese Standards Association
| Document Type | Standard |
| Status | Current |
| Publisher | Japanese Standards Association |